This first one was written by Rav Yitzchak Abuhav for the Arizal, in which the Ari wrote all of the shemot hakodesh himself:
This one is from Rav Sulamein Ochana, a Persian sofer from the roughly the same time. What is interesting about both of these first two is that the sephardi sofrim were clearly holding by Rashi and not Rambam on the shape of the Chet.
This one is from Rav Yedida Rafael Abulafia, 7th Rosh Yeshiva of Yeshivat HaMekubalim Beit El, who served as sofer for the previous five Roshei Yeshivot.
This is the writing of the Kol Yaakov himself. Notice at this point the mekubalim started placing a tag on the vav of Shem HaShem.
Sefer Torah from Rav Ezra Shayo an important Rav, posek, mekubal and sofer in Beit El
This is from Rav Yehuda Patya a famous mekubal and sofer. You can see in this his attempt to get the Ayin and Dalet as close to the sirtut as possible. Also that he placed a tag on the vav of shem hashem, though it seems he was chozer on that later in his life.